Biography

Experience

[2008-]

Group leader - Passive Components and Sensors at Department of Applied Photonics, MULTITEL asbl

[2002-2007]

PhD Thesis at KUL in collaboration with IMEC: Photoelectrothermal Modulated Optical Reflectance (PMOR) with Carrier Illumination (CI) for the one-dimensional active dopant profile characterization of semiconductors Ultra-Shallow Junctions (USJ).

[2006-2008]

Project manager of FSEM, a finite elements (FEM) simulation software for semiconductor materials under high optical injection (fsem.sourceforge.net, GNU GPL).

[2003]

Supervisor of exercise sessions to master students in engineering for the course Semiconductor components (Pr. R.Mertens) [2002]

Developer of JMol (www.jmol.org), a molecular dynamics visualization software written in Java.

[2002]

Master Thesis at KUL: Growth and crystallization behavior of HfO2 gate dielectric thin films. This work is essentially experimental: X-Ray Diffraction (XRD) and X-Ray Fluorescence (XRF) material characterization.

[2001]

Master Thesis at ULg: Study of dynamical properties of crystalline ABO3 heterostructures (pdf) In this fundamental-research oriented work, I contributed to the density functional theory (DFT) simulation software.

Education

[2002-2007]

PhD student in engineering at the Catholic University of Leuven (KUL) in collaboration with the Interuniversity Micro-Electronic Center (IMEC)

[2001]

Specialization Master in materials engineering (materials for microelectronics), Catholic University of Leuven (KUL).

[1996-2001]

Master in physical engineering, solid state physics and optoelectronics, University of Liège (ULg).

Publications

J. Bogdanowicz, F. Dortu,T. Clarysse, W. Vandervorst. Theory of photomodulated optical reflectance on active doping profiles in silicon. In 15th International Conference on Photoacoustic and Photothermal Phenomena (ICPPP15), Leuven 2009

J. Bogdanowicz, F. Dortu, T. Clarysse, W. Vandervorst, E. Rosseel, N.D. Nguyen. Non-destructive extraction of junction depths of active doping profiles from photomodulated optical reflectance offset curves. In INSIGHT Workshop, NAPA, 2009

A. Kazmierczak, F. Dortu, O. Schrevens, D. Giannone, L. Vivien, D. Marris-Morini, D. Bouville, E. Cassan, K.B. Gylfason, H. Sohlström, B. Sanchez, A. Griol, and D. Hill. Light coupling and distribution for Si3N4/SiO2 integrated multichannel single mode sensing system. Optical Engineering 48 , 014401 (2009)

F. Dortu, J. Bogdanowicz, T. Clarysse, W. Vandervorst. Impact of bandgap narrowing and surface recombination on photoelectrothermal modulated optical reflectance (PMOR) power curves. J. Vac. Sci. Technol. B 26(1), 322 (2008)

D. Hill, B. Sanchez, A. Griol, G. Maire, F. Dortu, L. Vivien, A.-S. Stragier, D. Marris-Morini, E. Cassan, A. Kazmierczak, D. Giannone, K.B. Gylfason, H. Sohlström, M.J. Bañuls, V. González-Pedro, A. Maquieira, C.A. Barrios, M. Holgado, and R. Casquel. Ultrahigh sensitivity slot-waveguide biosensor on a highly integrated chip for simultaneous diagnosis of multiple diseases. In IEEE/LEOS Optical MEMS and Nanophotonics, Freiburg, Germany, August 2008. Invited talk.

J. Bogdanowicz, F. Dortu, T. Clarysse, W. Vandervorst, D. Shaughnessy , A. Salnik , L. Nicolaides and J. Opsal. Impact of Inactive Dopants in Chemical Vapor Deposition Layers on Photomodulated Optical Reflectance. J. Vac. Sci. & Technol. B 154-155, 234 (2008)

J. Bogdanowicz, F. Dortu, T. Clarysse, W. Vandervorst, D. Shaughnessy , A. Salnik , L. Nicolaides and J. Opsal. Advances in Optical Carrier Profiling through High-Frequency Modulated Optical Reflectance. J. Vac. Sci. Technol. B 26(1), 310 (2008)

A. Kazmiercak, L. Vivien, K.B. Gylfason, B. Sanchez, A. Griol, D. Marris-Morini, E. Cassan, F. Dortu, H. Sohlstrom, D. Giannone and D. Hill High quality optical microring resonators in Si3N4/SiO2. In European Conference on Integrated Optics, Eindhoven, The Netherlands, June 2008. Oral presentation.

F. Dortu, J. Bogdanowicz, T. Clarysse, R. Loo, and W. Vandervorst. Nonlinear study of photoelectrothermal modulated reflectance for active dopant profile extraction. J. Appl. Phys. 101, 053107 (2007)

F. Dortu, T. Clarysse, R. Loo, B. Pawlak, R. Delhougne, and W. Vandervorst. Progress in the physical modeling of carrier illumination. J. Vac. Sci. Technol. B 24(3), 1131 (2006)

F. Dortu, T. Clarysse, R. Loo, and W. Vandervorst. Extracting active dopant profile information from carrier illumination power curves. J. Vac. Sci. Technol. B 24(1), 375 (2006)

F. Dortu, J. Bogdanowicz. FSEM, a Finite element software for SEMiconductors http://fsem.sourceforge.net, 2006, GNU GPL

T. Clarysse, F. Dortu, and W. Vandervorst. PATENT: Method for the independent extraction of the carrier concentration level and electrical junction depth in carrier illumination. USPTO Applicaton 20070292976

T. Clarysse, F. Dortu, D. Vanhaeren, I. Hoflijk, L. Geenen, T. Janssens, R. Loo, W. Vandervorst, B.J. Pawlak, V. Ouzeaud, C. Defranoux, V.N. Faifer, and M.I. Current. Accurate electrical activation characterization of CMOS ultra-shallow profiles. J. Mat. Sc. Eng. B 114-15(1), 166 (2004)

FarCry - Mollio